-
51
-
Design and Fabrication of Self-aligned Parallel-plate Type Micromirror Array
-
유병욱;
김민수;
진주영;
전진아;
박재형;
김용권;
School of Electrical Engineering and Computer Science, Seoul National University;
School of Electrical Engineering and Computer Science, Seoul National University;
School of Electrical Engineering and Computer Science, Seoul National University;
Department of Physics, Ewha Womans University;
Department of Physics, Ewha Womans University;
School of Electrical Engineering and Computer Science, Seoul National University;
(대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문,
v.2007,
2007,
pp.150-151)
-
52
-
Design and fabrication of 2-DOF scanning mirror with Polydimethylsiloxane sloped electrode
-
진주영;
박재형;
유병욱;
장윤호;
박일흥;
김용권;
School of Electrical Engineering and Computer Science, Seoul National University;
Department of Physics, Ewha Womans University;
School of Electrical Engineering and Computer Science, Seoul National University;
School of Electrical Engineering and Computer Science, Seoul National University;
Department of Physics, Ewha Womans University;
School of Electrical Engineering and Computer Science, Seoul National University;
(대한전기학회 2009년도 제40회 하계학술대회,
v.2009,
2009,
pp.1499-1500)
-
53
-
Wafer-Level Fabrication of a Two-Axis Micromirror Driven by the Vertical Comb Drive
-
김민수;
유병욱;
진주영;
전진아;
박재형;
김용권;
School of Electrical Engineering and Computer Science, Seoul National University;
School of Electrical Engineering and Computer Science, Seoul National University;
School of Electrical Engineering and Computer Science, Seoul National University;
Research Center of MEMS Space Telescope, Ewha Womans University;
Research Center of MEMS Space Telescope, Ewha Womans University;
Research Center of MEMS Space Telescope, Ewha Womans University;
School of Electrical Engineering and Computer Science, Seoul National University;
(대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문,
v.2007,
2007,
pp.148-149)
-
54
-
A clindrical post dipping method to fabricate PDMS microlens array
-
이경건;
장윤호;
유병욱;
진주영;
하준근;
박재형;
김용권;
School of Electrical Engineering and Computer Science, Seoul National University;
School of Electrical Engineering and Computer Science, Seoul National University;
School of Electrical Engineering and Computer Science, Seoul National University;
School of Electrical Engineering and Computer Science, Seoul National University;
School of Electrical Engineering and Computer Science, Seoul National University;
Department of Physics, Ewha Womans University;
School of Electrical Engineering and Computer Science, Seoul National University;
(대한전기학회 2009년도 제40회 하계학술대회,
v.2009,
2009,
pp.1495-1496)

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